JPH0315531Y2 - - Google Patents
Info
- Publication number
- JPH0315531Y2 JPH0315531Y2 JP12900485U JP12900485U JPH0315531Y2 JP H0315531 Y2 JPH0315531 Y2 JP H0315531Y2 JP 12900485 U JP12900485 U JP 12900485U JP 12900485 U JP12900485 U JP 12900485U JP H0315531 Y2 JPH0315531 Y2 JP H0315531Y2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- vacuum chamber
- shower tube
- processing apparatus
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 238000012986 modification Methods 0.000 claims description 3
- 230000004048 modification Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000003973 paint Substances 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- -1 polypropylene Polymers 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000003570 air Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 230000005495 cold plasma Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12900485U JPH0315531Y2 (en]) | 1985-08-24 | 1985-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12900485U JPH0315531Y2 (en]) | 1985-08-24 | 1985-08-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6237054U JPS6237054U (en]) | 1987-03-05 |
| JPH0315531Y2 true JPH0315531Y2 (en]) | 1991-04-04 |
Family
ID=31025188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12900485U Expired JPH0315531Y2 (en]) | 1985-08-24 | 1985-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0315531Y2 (en]) |
-
1985
- 1985-08-24 JP JP12900485U patent/JPH0315531Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6237054U (en]) | 1987-03-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100219873B1 (ko) | 플라즈마 가공을 위한 장치 및 방법 | |
| JPS62274080A (ja) | プラズマ処理方法 | |
| US20030185982A1 (en) | Method and device for treating surfaces using a glow discharge plasma | |
| US11384420B2 (en) | Method and device for promoting adhesion of metallic surfaces | |
| WO1997044503A1 (en) | Method and apparatus for treating inside surfaces of containers | |
| JP2005527700A (ja) | 有機物質でコーティングされた材料の表面をプラズマクリーニングするための方法、およびこの方法を実行するための装置 | |
| JP2002532828A (ja) | プラズマ発生のための中空の陰極のアレー | |
| JPH0315531Y2 (en]) | ||
| US4595570A (en) | Apparatus and method for plasma treatment of resin material | |
| JPS58208326A (ja) | プラズマ処理方法 | |
| JP3267306B2 (ja) | 半導体装置の製造方法 | |
| JPS6173746A (ja) | 樹脂成形品のプラズマ処理法 | |
| JPS59189130A (ja) | プラズマ処理方法 | |
| JPH0512033B2 (en]) | ||
| JPS5920332A (ja) | プラズマ処理を施す方法および装置 | |
| JP2001185398A (ja) | 常圧プラズマ処理装置及び処理方法 | |
| JPS6048338A (ja) | プラズマ処理方法 | |
| JPH0228223A (ja) | プラズマ処理装置 | |
| JPH01279761A (ja) | 薄膜形成装置 | |
| JPH0495B2 (en]) | ||
| JPH0527707B2 (en]) | ||
| JPH01130517A (ja) | プラズマｃｖｄ装置 | |
| JPH07138759A (ja) | 真空処理装置 | |
| JPH021911A (ja) | 有機被膜の除去装置 | |
| JPS61120835A (ja) | マイクロ波プラズマ処理装置 |